Extensions of the Stoney formula for substrate curvature to configurations with thin substrates or large deformations

نویسنده

  • L. B. Freund
چکیده

Two main assumptions which underlie the Stoney formula relating substrate curvature to mismatch strain in a bonded thin film are that the film is very thin compared to the substrate, and the deformations are infinitesimally small. Expressions for the curvature-strain relationship are derived for cases in which these assumptions are relaxed, thereby providing a basis for interpretation of experimental observations for a broader class of film-substrate configurations. PACS: 06.30.B, 68.60.B, 83.10.F

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تاریخ انتشار 2007